Air Bearing Stage for 300mm Wafer w/ Chuck & Newport IMS1200LM Motorized Stage

Manufacturer: Newport Electronics

Model: IMS1200LM

Condition: Used. This Motorized Linear Stage with Air Bearing Stage and Vacuum Chuck is in good cosmetic condition with scuffs and scratches from regular industrial use.  There is some visible residue on the top of the Air Bearing Chuck, which was cleaned with alcohol.  The internals of the Linear Stage are clean and in good condition.  The Vacuum Chuck was soaked in alcohol to remove the residue that had accumulated over time.  The cleaning removed the vast majority of residue but some small amounts remain.  All of the pneumatic hoses and electrical cables are attached, included, and are in place within the functional cable chain attached to the Linear Stage.  The Stage Plate on the Linear Stage is in place and included (see photo).  Comes in non-original packaging. 
The photos show the exact item(s) the buyer will receive.

Notes: We supplied air to the intakes on the chuck and confirmed that air passed out through both the top and the bottom.  Additionally, we manually slid the slide back and forth and confirmed that it moved smoothly as designed.  No additional testing was performed.
No manuals, cords/cables, or additional items are included if not listed or shown.

Included:

• (1) Air Bearing Stage for 300mm Wafer w/ Chuck & Newport IMS1200LM Motorized Stage

Specifications:

• Manufacturer: Hagbros / Newport Electronics
• Model: 4000-5333-03 / IMS1200LM
• Description: Air Bearing Stage with Vacuum Chuck and Motorized Linear Stage, Linear Motor
  • Air Bearing Stage
    • For 300mm Wafer
    • 18"W x 15-3/4"D x 2"H
  • Vacuum Chuck
    • Hagbros 4000-5333-03
    • 7/2013
    • Rev 001
    • 11-3/4" Circular/Round
    • 1" Thick
    • For 300mm Wafer
  • Linear Stage w/ Linear Motor
    • Newport IMS1200LM
      • Motorized Linear Stage
      • Travel Range1200 mm
      • Maximum Speed11000 mm/s
      • Minimum Incremental Motion20 nm
      • Continuous Motor Force100 N
      • Peak Motor Force210 N
      • Centered Load Capacity600 N
      • Accuracy, Typical±5.0 µm
      • Accuracy, Guaranteed±9.0 µm
      • Bi-directional Repeatability, Typical±0.13 µm
      • Bi-directional Repeatability, Guaranteed±0.50 µm
      • Pitch, Typical±125 µrad
      • Pitch, Guaranteed±250 µrad
      • Compliance in Pitch2 µrad/Nm
      • Yaw, Typical±40 µrad
      • Yaw, Guaranteed±150 µrad
      • Compliance in Yaw1 µrad/Nm
      • Compliance in Roll2 µrad/Nm
      • Drive TypeLinear Motor
      • Origin Repeatability±0.05 µm
      • Thread Type1/4-20
      • Weight32 kg
      • MTBF20,000 h (25% load, 30% duty cycle)
      • Maximum Power Consumption220 W
      • ComplianceRoHS 3, CE

30 Day Guarantee

• Guaranteed to be as described
• Can be returned for flaws or malfunctions that were not disclosed
• See complete terms

CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.