Brooks SLA7950D Digital MFC Mass Flow Controller 1/4" VCR DeviceNet (NF3 / 1.5L)

Manufacturer: Brooks Instrument

Model: SLA7950D1EGG1A2A1

Condition: Used. Comes in non-original sealed ESD packaging.  This mass flow controller is in great condition with a few very minor scuffs and scratches on the case, but nothing major or anything that would affect function. Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This mass flow controller was pulled from a working assembly that was being decommissioned, but was not tested separately after removal. No manuals, cords/cables, or additional items are included if not listed or shown.

Included:

• (1) Brooks Instrument SLA7950D Mass Flow Controller

Specifications:

• Manufacturer: Brooks Instrument
• Model: SLA7950D
• Model Number: SLA7950D1EGG1A2A1
• AMAT Part #: 41529-89
• Description: Mass Flow Controller (MFC)
• Process Gas: NF3 (Nitrogen Trifluoride Gas)
• Flow Rate: 1,500 SCCM (1.5 SLM)
• Interface: DeviceNet
• End Connection: 1/4" Male VCR
• Flow Accuracy: ± 0.7% of rate plus ± 0.2% F.S at calibration conditions
• Repeatability: ± 0.25% of rate
• Stability: Less than ± 0.5% of rate per year
• Materials of Construction: 316L, 316L VAR (vacuum arc remelt) and high alloy ferritic stainless steel
• Seal Material: Nickel
• Surface Finish: 10 Ra
• Weight: 2.05 lbs.
• Condition: Used
• Quantity: 1

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CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.