Celerity Unit UFC-8565C Mass Flow Controller MFC Valve D-Net (SiH4/300cc) C-Seal

Manufacturer: Celerity

Model: UFC-8565C

Condition: Used. Comes in a non-original sealed ESD-safe bag.  This mass flow controller is in excellent condition with a few very minor scuffs and scratches from normal use, but nothing major or anything that would affect function. Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This mass flow controller was pulled from a working setup that was being decommissioned, but was not tested separately after removal. No manuals, cords/cables, or additional items are included if not listed or shown.

Included:

• (1) Celerity Unit UFC-8565C Mass Flow Controller

Specifications:

• Manufacturer: Celerity
• Brand: Unit
• Model: UFC-8565C
• AMAT Part #: 0190-16329-03
• Type: MultiFlo (SC14)
• Process Gas: SiH4 (Silane Gas)
• Flow Rate: 300 SCCM
• Seals: Downport - C Seals
• Interface: DeviceNet (5 Pin "M8")
• Mounting Position: Horizontal or Vertical
• Footprint: 1.125"
• Surface Finish: 4µ inch Ra
• Valve Position: Normally Closed
• Gas and Range Configurable: Yes
• Weight: 2.30 lbs.
• Condition: Used
• Quantity: 1

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