MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet B

SKU:
X51S002
Shipping:
Calculated at Checkout
Condition:
Used
Warranty & Returns:
Easy 30-Day Free Returns
  • MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet B
  • MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet B
  • MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet B
  • MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet B
$149.99

Description

Manufacturer: MKS

Model: DLTNA3-33135

Condition: Used. Comes in non-original packaging. The bag has been opened and the unit has some scratching on the top and bottom from installation and use, but is in good condition.
Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This Flow Ratio Controller was removed from a working setup and has not been tested since its removal.
No manuals, cords/cables, or additional items are included if not listed or shown.

Included:

  • (1) MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet

Specifications:

  • Manufacturer: MKS
  • Model: DLTNA3-33135
  • Type: Delta III Flow Ratio Controller
  • Full-Scale Flow Range 1000 sccm (1 SLM)
  • Calibration Gas: N2 (Nitrogen)
  • Percentage Accuracy ±2% set point (for flow ≥10% of channel Full Scale)
  • Channel Flow Control Range 0, 5-100% Full Scale
  • Ratio Control Range 0, 5-100% Full Scale
  • Percentage Repeatability ±0.3% of set point
  • Repeatability ±0.3% of set point
  • Resolution 0.02% of channel Full Scale
  • Maximum Operating Outlet Pressure 200 Torr at maximum flow rate through all channels
  • Maximum Allowable Outlet Pressure Differential 50 Torr with the same percentage flow through all channels
  • Normal Operating Pressure Differential <150 Torr @ 3K split 33.3%; Except, <450 Torr for 10K/10K
  • Percentage Settling Time <3 seconds (typical dependent on downstream conductance matching)
  • Input Ratio Range 0, 2 to 100% of total flow within flow channel control range
  • Maximum Inlet Pressure 150 psig (non-operational)
  • Zero Temperature Coefficient <0.05% Full Scale/°C (500 ppm)
  • Span Temperature Coefficient <0.08% of Reading/°C (800 ppm)
  • Warm-up Time 60 minutes
  • Operating Temperature 10-40°C
  • Storage Temperature -20-65°C
  • Storage Humidity 0-95% relative humidity, non-condensing
  • Temperature Display 0-100°C
  • Temperature Accuracy 2°C
  • Temperature Resolution 0.1°C
  • Fitting Type 4 VCR male, non-rotatable
  • External Leak Integrity <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve <2% of channel Full Scale at 500 Torr differential to <10 Torr
  • Mounting: Inline
  • Input Port: 1/4" Male VCR
  • Output Port 1: 1/4" Male VCR
  • Output Port 2: 1/4" Male VCR
  • Output Port 3: 1/4" Male VCR

CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.

View AllClose

Warranty Information

Easy 30-Day Free Returns

  • Items can be returned for any reason within 30 days of delivery.
  • To initiate a return, the buyer must notify Dougdeals in writing within this period.
  • Dougdeals will cover return shipping costs and process a full refund, including the original shipping charges, within two business days of receiving the returned item.

Return Authorization Requirements

  • Returns must be authorized by Dougdeals and include an assigned RMA (Return Merchandise Authorization) number.
  • Dougdeals will arrange return shipping and provide a return label to the buyer.
  • Authorized returns must be received by Dougdeals within 21 days of authorization.

Exclusions and Limitations

  • Dougdeals may provide a replacement or substitute item instead of a refund at its discretion.
  • Returned items must be in the same condition as when sent and include all components.
  • There is no restocking fee, but Dougdeals reserves the right to deduct costs from the refund for altered or damaged items.
  • This return policy does not apply to orders shipped internationally, to U.S. territories, Alaska, or Hawaii.

Shipping and Responsibility

  • Buyers are responsible for international and expedited shipping costs, import fees, calibration, and testing fees.
  • Damages occurring during transit via Dougdeals-arranged third-party services or Dougdeals employee delivery must be noted in writing on the delivery receipt at the time of delivery. Failure to do so will result in the buyer assuming responsibility for damage claims.
  • Dougdeals is not liable for loss or damage during transit via buyer-arranged shipping services.
  • Customs, duties, taxes, and brokerage fees for international shipments are the buyer's responsibility.

Contact Us

Headquarters:
CDN Systems | DougDeals
12510 Trails End Rd.
Leander, TX 78641

Contact via phone:
Toll free: 877-328-9236
Main office: 512-933-0081
Local Craigslist: 512-913-6048
Local eBay: 512-999-3894
Fax: 512-873-0745

Contact online:
Sales inquiries: sales@dougdeals.com
Craigslist and local sales: local@dougdeals.com
Customer support: support@dougdeals.com

View AllClose