Rudolph AutoEL III Automatic Laser Ellipsometer -Works but has Funky Optics

Manufacturer: Rudolph Research

Model: AutoEL III

Condition: For Parts or Not Working. Comes in non-original packaging. Cosmetic condition is Good from a few feet away, but up close you will note lots of small stains/scuffs/scratches/label residues.  The stage can be wobbled by hand (we're not sure if this is normal). The photos show the exact item(s) the buyer will receive.

Notes: This ellipsometer is in PARTIAL working condition.  We were NOT able to see anything but a circle of scratches in the collimator viewing tube.  We got repeatable measurements from just the stage surface, and different measurements with a couple of objects we had laying around the shop (kapton film and a Si wafer).  The stage flops a little when pushed by hand but apparently stays in place well enough to make measurements.  When power is applied, the machine goes through its boot sequence and initializes.  When prompted to push Program or Continue, and continue is selected, an EEPROM error shows; when Program is selected, it keeps going.  We input program 211000 and an NL value of 1.64 and the machine went into a state where it would make a measurement every time the Continue button was pressed.  We don't have any standards to compare to the readings given by this machine so we are not sure the readings it gives are accurate.  The stage can be adjusted so the laser shines into the aperture of the analyzer.  The collimator's light shines a very dim circle on the stage about where the laser hits. NO other testing was done. No manuals, cords/cables, or additional items are included if not listed or shown.

Included:

• (1) Rudolph AutoEL III Ellipsometer
• (2) Keys
• (1) Power Cord

Specifications:

• Manufacturer: Rudolph
• Model Auto EL III
• Laser ellipsometer
• Nondestructive, precision film thickness measurement
• Simple to use
• Highly repeatable
• Automatically transforms delta and psi into thickness and refractive index
• Thermal printer for hard copy results
• Light source: HeNe red laser
• Max. wafer size: 6"
• Measuring time: 17 seconds typical, 50 seconds maximum
• Thickness range: 10 angstrom to 30 micron

AS-IS

• No returns - No refunds - No exchanges
• By purchasing this item, you are agreeing to not seek reimbursement should the item not function to the manufacturer's specifications.
• Read the notes carefully to ensure you are buying something you can use
• See complete terms

CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.